Summary of Key Achievements
The first prize of the 2025 National Science and Technology Progress Award was awarded to a project led by Tongji University, titled “Nanometric Key Technologies for Quantumizing Optical Lattice Constants and Their Applications in Integrated Circuits.” This project, which took more than two decades to develop, has created precise “nanoscale rulers” using fundamental physical constants. It has addressed the issue of errors in traditional nanometry methods and enables direct calibration of equipment at the industrial site. This breakthrough is particularly crucial for high-end manufacturing processes such as integrated circuits (ICs) and has also supported the development of domestically produced, high-quality measurement equipment.
Detailed Explanation
1. Technical Innovation: Using Fundamental Constants to Create Error-Free Rulers
The most remarkable aspect of this technology is its ability to transform fundamental physical constants into tangible measuring tools. Here’s how it works:
- Identifying Natural References: The wavelength of quantum transitions in chromium atoms in a vacuum is a fixed, constant value, just as stable as the speed of light.
- Creating an Optical Template: A laser frequency comb is used to lock the laser at this specific wavelength. When two lasers with this frequency are combined, they produce a pattern of alternating bright and dark regions known as a “quantized optical lattice,” where the spacing between the grills corresponds precisely to half of this wavelength, thus firmly linking the measurement to the natural constant.
- Guiding Atoms: Cold chromium atoms (which are in a highly stable state) are passed through this optical lattice, and the atomic motion is manipulated by the light field to create precise markings on a substrate. These markings are not created by machinery but are formed naturally according to the properties of the fundamental constant; since the natural constant remains unchanged over time, the measurements are inherently accurate.
2. Advantages Over Traditional Methods: Eliminating Errors and Enabling Direct Calibration
Traditional nanometry methods are akin to a “relay race” where measurements start from the most precise standards and are progressively transmitted to the industrial site, with each step potentially introducing errors. This new technology:
- Direct Accuracy: The ruler itself embodies the international definition of the meter, eliminating the need for multiple calibration steps and ensuring direct, error-free measurement at the industrial level.
- Industry-Friendly Design: It is well-suited to the needs of nanomanufacturing, which emphasizes flat, integrated, and compact systems (e.g., allowing for on-site calibration without the need to transport samples to a laboratory).
3. Practical Impact on the Industry: Providing Accurate Standards for Integrated Circuit Measurement
Integrated circuit manufacturing requires extremely precise measurement equipment, and the accuracy of such equipment depends on the calibration standards used. This project has:
- Solved a Critical Issue: The developed wafer-level calibration standards have been recognized as national secondary reference materials, providing a basis for calibrating domestically produced IC measurement devices.
- Actual Application: These standards are already in use by domestic companies and were included in the first batch of advanced and applicable technologies identified by the Ministry of Industry and Information Technology in 2025, contributing to the autonomy and reliability of China’s high-end manufacturing equipment.
4. Long-Term Significance: Keeping Pace with International Trends and Driving Nanomanufacturing Advancements
Nanomanufacturing is moving towards atomic-level precision, demanding increasingly precise measurement methods. This technology:
- Aligns with Global Trends: It aligns with global trends toward the use of fundamental constants as measurement units and the simplification of value transfer processes.
- Fosters Industrial Growth: The development of such accurate measuring tools will enable more advanced nanomanufacturing processes (e.g., the production of finer chips), enhancing China’s competitiveness in high-end manufacturing sectors.
In summary, this technology provides a reliable foundation for nanomanufacturing by solving current calibration challenges and paving the way for even more precise manufacturing methods in the future.